Atlas Copco

Last updated April 7, 2026

Innovation Areas

Cryogenic vacuum and thermal control: Atlas CopcoRecent Research Landscape

Condensation and reactive chemical buildup in semiconductor exhaust lines cause pump failure and energy inefficiency, requiring integrated thermal and fluid control.

What technical problems is Atlas Copco addressing in Cryogenic vacuum and thermal control?

Exhaust chemical vapor condensation

(9)evidences

Reactive precursor vapors condense and deposit solids within vacuum pump exhaust lines, causing blockages and increasing maintenance frequency in semiconductor manufacturing.

Cryogenic refrigerant freezeout

(15)evidences

Impurities in the refrigerant and inefficient regeneration cycles lead to degraded cooling performance and component failure in cryopumps.

Vacuum pump humidity condensation

(21)evidences

Inefficient vacuum pump operation leads to excessive power usage and premature component failure due to unmonitored thermal stress or service requirements.