Saint Gobain

Last updated February 23, 2026

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Rare earth oxide plasma coatings: Saint GobainRecent Research Landscape

Plasma erosion in semiconductor etching chambers causes particle contamination and frequent downtime. High-purity thermal spray powders provide a chemically resistant barrier to extend component lifecycle.

What technical problems is Saint Gobain addressing in Rare earth oxide plasma coatings?

Plasma erosion and contamination

(1)evidences

Halogen-based plasma environments cause rapid material thinning and surface degradation in semiconductor processing chambers. Preventing this failure extends component lifespan and reduces wafer contamination.