How high-k dielectric scaling problems are being solved in the Semiconductor Industry?

The scaling of high-k dielectric materials for advanced semiconductor devices faces several challenges. As the gate oxide thickness decreases, the leakage current through the dielectric increases, leading to higher power consumption and reliability issues. Finding high-k materials with suitable band offsets, thermal stability, and compatibility with the semiconductor channel material is a significant obstacle. Additionally, the integration of these materials into the manufacturing process while maintaining high-quality interfaces and minimizing defects remains a complex task.

We’ve curated applications and patents from the semiconductor industry over the past three years. Following an auto-landscape analysis, we’ve distilled the following insights. Because of the lag in time between patent filing and publication of the related application (on
average 18 months), this report does not give a complete picture but rather a perspective on
publicly available semiconductor-related patent information up until February 2024.

Summary

Changxin Memory Technologies’s presence among the top assignees is surprising because it is a relatively lesser-known company compared to industry giants like Samsung and TSMC. This could indicate the company’s strong focus and investment in research and development, particularly in the memory technology domain.

Who are the top companies working on high-k dielectric scaling materials in semiconductors?

CompaniesPatent Count
Samsung Electronics Co Ltd37
Taiwan Semiconductor Manufacturing Co TSMC Ltd30
Changxin Memory Technologies Inc13

Who is collaborating in high-k dielectric scaling materials in semiconductors?

CompaniesCount
Toshiba Corp & Toshiba Electronic Devices and Storage Corp3
Denso Corp & Kochi Prefectural University Corp & Mirise Technologies Corp & Toyota Motor Corp2
EMD Performance Materials Corp & Merck Patent GmbH & North Carolina State University1
Industry University Cooperation Foundation IUCF HYU & LG Display Co Ltd1
DNF Co Ltd & Samsung Electronics Co Ltd1

Who are the top inventors that are working on high-k dielectric scaling materials in semiconductors?

InventorsPatent count
Jooho Lee10
Chi On Chui7
Yongsung Kim7

What are the filing trends of high-k dielectric scaling materials in semiconductors?

YearPatent count
202154
2022103
202318

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